A micro-polymerase chain reaction chip fabricated by MEMS technology, was successfully used to amplify the DNA molecule of GUS gene. Kinds of micro-chamber PCR chip were designed and fabricated. The surface of the chamber was washed and prepared using a special method. Sample amplification was performed with thermal cycling system. The GUS gene amplified in chip was analyzed by slab gel electrophoresis with separation of DNA markers in parallel. The polymerase chain reaction was successfully performed in chip. The rapid PCR was completed in 37 min for 24 cycles. The thermal cycle time in chip was reduced to 1/2 with a commercial PCR instrument.